Applications
Acid Solutions in Semiconductor Production

In Line Determination of Acid Chemistry in Real-Time

Semiconductor Applications - Acid Baths, Wet Etching and More

The Apex and ApexPro Acid Analyzers provides an real-time monitoring of acid baths and wet chemistry. Measure acid concentration and formulation for acid baths, wet etching, cleaning and recycling in semiconductor, IC, PCB and solar cell manufacturing.  Accurate in-line measurements results integrate with your control system seamlessly for a complete online bath monitoring solution. 

Harsh acids, caustics and cleaning solutions are vital parts of semiconductor manufacturing, industrial cleaning and a variety of other industries. Solution chemistry and acid concentrations need to be monitored to ensure product quality and consistency.  Accurately determine the concentration of these critical chemicals online or in the laboratory. The Apex Analyzers feature an assortment of acid bath sensors and probes compatible with harsh chemical, caustic, and acid streams. 

Contact us for more details on what the Verum Apex Acid Analyxers can do for you.

Download the Verum Analytics Wet Acid Bath Analyzer brochure.

Acids and Caustics in Semiconductor Production

Verum acid sensors are compatible for use in the most harsh chemical environments, designed specifically for wet chemical processes.  Constructed of Teflon, Hastelloy, Titanium, or with special coatings, they are intrinsically safe, rugged, and are supplied in a variety of configurations for analyzing chemistry in the bath, in the process stream, and even through tubing with clamp on models.  Measurements of acid formulations online or in the lab allows for optimum process performance and cost reduction. Measure a wide range of acids and caustics, even at high concentrations and at high temperatures.

  • Measure acids, bases, cleaning, etching and other solutions:
    H2SO4 (Sulfuric Acid)
    Na2CO3 (Sodium Carbonate)
    HF (Hydroflouric Acid)
    NH4OH (Ammonium Hydroxide)
    HCl (Hydrochloric Acid)
    SC-1
    HNO3 (Nitric Acid)
    SC-2
    CH3COOH (Acetic Acid)
    H2O2 (Hydrogen Peroxide)
    NaOH (Sodium Hydroxide)
    TMAH (Tetramethylammonium hydroxide)
  • Measure moisture in solutions and final products
  • Monitor solution recovery systems to save money and ensure performance
  • Ensure optimal product quality and reduce operational expenses
  • Prevent excursions and out of control process conditions by catching process upsets before they happen.

Online analysis for real time process monitoring

With inline analysis of stream composition, quality testing is fully automated.  The ApexPro virtually eliminates the need for pulling gab samples and performing complicated and hazardous laboratory testing.  The ApexPro provides a safe way to test hazardous etching and washing solutions.

The ProVBus automation software provides maximum simplicity.  Results are integrated directly to the PLC, LIMS, or process controller for instant display and response using any protocol (Modbus RTU, TCP, Hart, 4-20mA, OPC, Serial Communications, and more…). 

The ProVBus Online Acid analyzer is designed to run constantly for years without any user intervention.  Automated measurements, self-diagnostics, and full online integration provides a worry-free, simple to operate, and easy to maintain process control tool.

Online monitoring of acid concentrations and bath formulations in semiconductor manufacturing and solution recycling can lead to significant cost savings. Maximize the usage of your solutions, monitor and control key quality parameters, all in real time. Online monitoring of the concentrations of your critical ingredients ensures optimal performance and reduces process variations.

  • Measure up to 20 acid baths or process streams simultaneously
  • Integrate your analyzer directly into your control system via protocols such as Modbus, 4-20ma, etc.
  • Real Time monitoring of processing fluids with instant knowledge of the processing conditions
  • Have your plant to run the process within the limits you set and keep it within those limits
  • Measuring probes and sensors for online measurement in harsh environments

Contact Verum Analytics for more information on how we can help you with your measurement requirements.

Updating Technology

Verum Analytics is now offering its newest analyzer design, the Apex NIR platform, in place of the IsoChem.  The Apex offers many advantages without any drawbacks.  We provide trade-in offers to help our customers benefit from the latest and best analyzers.  Contact us if you are ready to upgrade.

Watch our short introductory video and see how we can help you with your measurement requirements.

Have a question about a measurement? Contact our applications department with your details.